Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges
D.A. Carl and M.C. Williamson and Michael A. Lieberman and Allan J. Lichtenberg
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M90/81
, 1990
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-81.pdf
BibTeX citation:
@techreport{Carl:M90/81, Author= {Carl, D.A. and Williamson, M.C. and Lieberman, Michael A. and Lichtenberg, Allan J.}, Title= {Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges}, Year= {1990}, Month= {Sep}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1574.html}, Number= {UCB/ERL M90/81}, }
EndNote citation:
%0 Report %A Carl, D.A. %A Williamson, M.C. %A Lieberman, Michael A. %A Lichtenberg, Allan J. %T Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/81 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1574.html %F Carl:M90/81