D.A. Carl and M.C. Williamson and Michael A. Lieberman and Allan J. Lichtenberg

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/81

, 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-81.pdf


BibTeX citation:

@techreport{Carl:M90/81,
    Author= {Carl, D.A. and Williamson, M.C. and Lieberman, Michael A. and Lichtenberg, Allan J.},
    Title= {Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges},
    Year= {1990},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1574.html},
    Number= {UCB/ERL M90/81},
}

EndNote citation:

%0 Report
%A Carl, D.A. 
%A Williamson, M.C. 
%A Lieberman, Michael A. 
%A Lichtenberg, Allan J. 
%T Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/81
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1574.html
%F Carl:M90/81