Sheath Motion in a Capacitively Coupled Radio Frequency Discharges

B.P. Wood and Michael A. Lieberman and Allan J. Lichtenberg

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/83

1990

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/Archive/ERL-90-83.pdf

BibTeX citation:

@techreport{Wood:M90/83,
    Author= {Wood, B.P. and Lieberman, Michael A. and Lichtenberg, Allan J.},
    Title= {Sheath Motion in a Capacitively Coupled Radio Frequency Discharges},
    Year= {1990},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1586.html},
    Number= {UCB/ERL M90/83},
}

EndNote citation:

%0 Report
%A Wood, B.P. 
%A Lieberman, Michael A. 
%A Lichtenberg, Allan J. 
%T Sheath Motion in a Capacitively Coupled Radio Frequency Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/83
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1586.html
%F Wood:M90/83