Ginetto Addiego

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/89

, 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-89.pdf

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Addiego:M90/89,
    Author= {Addiego, Ginetto},
    Title= {Investigation of a Focused-Image Lens-Hologram Projection System for Microlithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {1990},
    Month= {Oct},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1600.html},
    Number= {UCB/ERL M90/89},
}

EndNote citation:

%0 Thesis
%A Addiego, Ginetto 
%T Investigation of a Focused-Image Lens-Hologram Projection System for Microlithography
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/89
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1600.html
%F Addiego:M90/89