Characterization of the Processing Plasma in an Engineering Prototype Reactor for Plasma Immersion Ion Implantation

R.A. Stewart and X.Y. Qian and D.A. Carl and B. Lake, Jr. and J. Benasso and R. Lynch and C.A. Pico and Michael A. Lieberman and Nathan W. Cheung

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/100

1990

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/Archive/ERL-90-100.pdf

BibTeX citation:

@techreport{Stewart:M90/100,
    Author= {Stewart, R.A. and Qian, X.Y. and Carl, D.A. and Lake, Jr., B. and Benasso, J. and Lynch, R. and Pico, C.A. and Lieberman, Michael A. and Cheung, Nathan W.},
    Title= {Characterization of the Processing Plasma in an Engineering Prototype Reactor for Plasma Immersion Ion Implantation},
    Year= {1990},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1621.html},
    Number= {UCB/ERL M90/100},
}

EndNote citation:

%0 Report
%A Stewart, R.A. 
%A Qian, X.Y. 
%A Carl, D.A. 
%A Lake, Jr., B. 
%A Benasso, J. 
%A Lynch, R. 
%A Pico, C.A. 
%A Lieberman, Michael A. 
%A Cheung, Nathan W. 
%T Characterization of the Processing Plasma in an Engineering Prototype Reactor for Plasma Immersion Ion Implantation
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/100
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1621.html
%F Stewart:M90/100