Hot-Wall Silicon Epitaxy | EECS at UC Berkeley

Carl J. Galewski

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/122

1990

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/Archive/ERL-90-122.pdf

Advisors: William G. Oldham

BibTeX citation:

@phdthesis{Galewski:M90/122,
    Author= {Galewski, Carl J.},
    Title= {Hot-Wall Silicon Epitaxy},
    School= {EECS Department, University of California, Berkeley},
    Year= {1990},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1669.html},
    Number= {UCB/ERL M90/122},
}

EndNote citation:

%0 Thesis
%A Galewski, Carl J. 
%T Hot-Wall Silicon Epitaxy
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/122
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1669.html
%F Galewski:M90/122