Electrostatic Comb Drive for Resonant Sensor and Actuator Applications
William C.-K. Tang
EECS Department, University of California, Berkeley
1990
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Tang:7771, Author= {Tang, William C.-K.}, Title= {Electrostatic Comb Drive for Resonant Sensor and Actuator Applications}, School= {EECS Department, University of California, Berkeley}, Year= {1990}, }
EndNote citation:
%0 Thesis %A Tang, William C.-K. %T Electrostatic Comb Drive for Resonant Sensor and Actuator Applications %I EECS Department, University of California, Berkeley %D 1990 %F Tang:7771