D.A. Carl and D.W. Hess and Michael A. Lieberman and T.D. Nguyen and R. Gronsky

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M91/5

, 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-5.pdf

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BibTeX citation:

@techreport{Carl:M91/5,
    Author= {Carl, D.A. and Hess, D.W. and Lieberman, Michael A. and Nguyen, T.D. and Gronsky, R.},
    Title= {Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma},
    Year= {1991},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1679.html},
    Number= {UCB/ERL M91/5},
}

EndNote citation:

%0 Report
%A Carl, D.A. 
%A Hess, D.W. 
%A Lieberman, Michael A. 
%A Nguyen, T.D. 
%A Gronsky, R. 
%T Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/5
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1679.html
%F Carl:M91/5