Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment

Gary S. May

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/33
April 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-33.pdf

Advisor: Costas J. Spanos

BibTeX citation:

@phdthesis{May:M91/33,
    Author = {May, Gary S.},
    Title = {Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment},
    School = {EECS Department, University of California, Berkeley},
    Year = {1991},
    Month = {Apr},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html},
    Number = {UCB/ERL M91/33}
}

EndNote citation:

%0 Thesis
%A May, Gary S.
%T Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/33
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html
%F May:M91/33