Gary S. May
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/33
April 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-33.pdf
Advisor: Costas J. Spanos
"; ?>
BibTeX citation:
@phdthesis{May:M91/33, Author = {May, Gary S.}, Title = {Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment}, School = {EECS Department, University of California, Berkeley}, Year = {1991}, Month = {Apr}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html}, Number = {UCB/ERL M91/33} }
EndNote citation:
%0 Thesis %A May, Gary S. %T Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/33 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html %F May:M91/33