Gary S. May

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M91/33

, 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-33.pdf

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{May:M91/33,
    Author= {May, Gary S.},
    Title= {Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment},
    School= {EECS Department, University of California, Berkeley},
    Year= {1991},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html},
    Number= {UCB/ERL M91/33},
}

EndNote citation:

%0 Thesis
%A May, Gary S. 
%T Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/33
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html
%F May:M91/33