Manufacturing-Based IC Process and Device Simulation

T.L. Luan

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/55
May 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-55.pdf

BibTeX citation:

@techreport{Luan:M91/55,
    Author = {Luan, T.L.},
    Title = {Manufacturing-Based IC Process and Device Simulation},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1991},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1774.html},
    Number = {UCB/ERL M91/55}
}

EndNote citation:

%0 Report
%A Luan, T.L.
%T Manufacturing-Based IC Process and Device Simulation
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/55
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1774.html
%F Luan:M91/55