Manufacturing-Based IC Process and Device Simulation
T.L. Luan
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M91/55
, 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-55.pdf
BibTeX citation:
@techreport{Luan:M91/55, Author= {Luan, T.L.}, Title= {Manufacturing-Based IC Process and Device Simulation}, Year= {1991}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1774.html}, Number= {UCB/ERL M91/55}, }
EndNote citation:
%0 Report %A Luan, T.L. %T Manufacturing-Based IC Process and Device Simulation %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/55 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1774.html %F Luan:M91/55