William G. Oldham and Andrew R. Neureuther

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M91/66

, 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-66.pdf

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BibTeX citation:

@techreport{Oldham:M91/66,
    Author= {Oldham, William G. and Neureuther, Andrew R.},
    Title= {Investigation of Process Technology Elements},
    Year= {1991},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html},
    Number= {UCB/ERL M91/66},
}

EndNote citation:

%0 Report
%A Oldham, William G. 
%A Neureuther, Andrew R. 
%T Investigation of Process Technology Elements
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/66
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html
%F Oldham:M91/66