William G. Oldham and Andrew R. Neureuther
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/66
June 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-66.pdf
"; ?>
BibTeX citation:
@techreport{Oldham:M91/66, Author = {Oldham, William G. and Neureuther, Andrew R.}, Title = {Investigation of Process Technology Elements}, Institution = {EECS Department, University of California, Berkeley}, Year = {1991}, Month = {Jun}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html}, Number = {UCB/ERL M91/66} }
EndNote citation:
%0 Report %A Oldham, William G. %A Neureuther, Andrew R. %T Investigation of Process Technology Elements %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/66 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html %F Oldham:M91/66