Investigation of Process Technology Elements

William G. Oldham and Andrew R. Neureuther

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/66
June 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-66.pdf

BibTeX citation:

@techreport{Oldham:M91/66,
    Author = {Oldham, William G. and Neureuther, Andrew R.},
    Title = {Investigation of Process Technology Elements},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1991},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html},
    Number = {UCB/ERL M91/66}
}

EndNote citation:

%0 Report
%A Oldham, William G.
%A Neureuther, Andrew R.
%T Investigation of Process Technology Elements
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/66
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html
%F Oldham:M91/66