R.H. Wang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M91/71

, 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-71.pdf

This report chronicles the development of BTU (Berkeley Topography Utilities) for linking topography and impurity diffusion simulations. Currently implemented on the data structures in the SIMPL-2 program, BTU solves the problem of combining topography and mesh points by providing functions to map topographies between strings generated by topography simulators such as SAMPLE and polygons which can be decomposed into triangular meshes used by impurity diffusion simulators such as SUPREM-IV. To facilitate the integration of topography and impurity diffusion simulators, BTU also includes functions which make a rectangular grid conform to topography, and convert the topography and impurity concentrations between rectangular grid and triangular meshes. The procedural interface is high level in the sense that the functionalities provided by BTU are independent of the underlying SIMPL-2 data structures and geometric algorithms. This allows TCAD developers to add and maintain easily links to other simulators, and gives them the option to reimplement BTU functions for robustness or efficiency as geometric modellers and adaptive grid generators becomes widely available. SIMPL-2 interfaces to SAMPLE and SUPREM-IV are used to demonstrate the procedural interface. Results and run times from SIMPL-IPX simulations of epitaxy with buried layers for submicron twin-well CMOS and BiCMOS processes and a 16-Mb DRAM trench capacitor are presented to demonstrate the simulation capabilities made possible by linking SAMPLE and SUPREM-IV through BTU and measure the performance of the current BTU implementation.

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BibTeX citation:

@techreport{Wang:M91/71,
    Author= {Wang, R.H.},
    Title= {BTU - Berkeley Topography Utilities for Linking Topography and Impurity Diffusion Simulations},
    Year= {1991},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1797.html},
    Number= {UCB/ERL M91/71},
    Abstract= {This report chronicles the development of BTU (Berkeley Topography
Utilities) for linking topography and impurity diffusion
simulations. Currently implemented on the data structures in the
SIMPL-2 program, BTU solves the problem of combining topography
and mesh points by providing functions to map topographies between
strings generated by topography simulators such as SAMPLE and 
polygons which can be decomposed into triangular meshes used by
impurity diffusion simulators such as SUPREM-IV. To facilitate the
integration of topography and impurity diffusion simulators, BTU
also includes functions which make a rectangular grid conform to
topography, and convert the topography and impurity concentrations
between rectangular grid and triangular meshes. The procedural
interface is high level in the sense that the functionalities
provided by BTU are independent of the underlying SIMPL-2 data
structures and geometric algorithms. This allows TCAD developers to
add and maintain easily links to other simulators, and gives them
the option to reimplement BTU functions for robustness or efficiency
as geometric modellers and adaptive grid generators becomes widely
available. SIMPL-2 interfaces to SAMPLE and SUPREM-IV are used to
demonstrate the procedural interface.  Results and run times from
SIMPL-IPX simulations of epitaxy with buried layers for submicron
twin-well CMOS and BiCMOS processes and a 16-Mb DRAM trench capacitor
are presented to demonstrate the simulation capabilities made
possible by linking SAMPLE and SUPREM-IV through BTU and measure
the performance of the current BTU implementation.},
}

EndNote citation:

%0 Report
%A Wang, R.H. 
%T BTU - Berkeley Topography Utilities for Linking Topography and Impurity Diffusion Simulations
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/71
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1797.html
%F Wang:M91/71