K.H. Tadros

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M91/72

, 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-72.pdf

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BibTeX citation:

@techreport{Tadros:M91/72,
    Author= {Tadros, K.H.},
    Title= {Investigation of Optical Phenomena in Photolithography and Optical Metrology Using Massively Parallel Simulation},
    Year= {1991},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1798.html},
    Number= {UCB/ERL M91/72},
}

EndNote citation:

%0 Report
%A Tadros, K.H. 
%T Investigation of Optical Phenomena in Photolithography and Optical Metrology Using Massively Parallel Simulation
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/72
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1798.html
%F Tadros:M91/72