A.H. Sato and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/81
September 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-81.pdf
BibTeX citation:
@techreport{Sato:M91/81, Author = {Sato, A.H. and Lieberman, Michael A.}, Title = {A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges}, Institution = {EECS Department, University of California, Berkeley}, Year = {1991}, Month = {Sep}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1813.html}, Number = {UCB/ERL M91/81} }
EndNote citation:
%0 Report %A Sato, A.H. %A Lieberman, Michael A. %T A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/81 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1813.html %F Sato:M91/81