A.H. Sato and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M91/81

, 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-81.pdf

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BibTeX citation:

@techreport{Sato:M91/81,
    Author= {Sato, A.H. and Lieberman, Michael A.},
    Title= {A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges},
    Year= {1991},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1813.html},
    Number= {UCB/ERL M91/81},
}

EndNote citation:

%0 Report
%A Sato, A.H. 
%A Lieberman, Michael A. 
%T A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/81
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1813.html
%F Sato:M91/81