William N. Partlo

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/14

, 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-14.pdf

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Partlo:M92/14,
    Author= {Partlo, William N.},
    Title= {Issues in Deep-UV Lithography Using Pulsed Laser Light Sources},
    School= {EECS Department, University of California, Berkeley},
    Year= {1992},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/1954.html},
    Number= {UCB/ERL M92/14},
}

EndNote citation:

%0 Thesis
%A Partlo, William N. 
%T Issues in Deep-UV Lithography Using Pulsed Laser Light Sources
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/14
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/1954.html
%F Partlo:M92/14