A.H. Sato and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/34

, 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-34.pdf

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BibTeX citation:

@techreport{Sato:M92/34,
    Author= {Sato, A.H. and Lieberman, Michael A.},
    Title= {RF Discharge Impedance Measurements and Comparison to a Discharge Model},
    Year= {1992},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/1998.html},
    Number= {UCB/ERL M92/34},
}

EndNote citation:

%0 Report
%A Sato, A.H. 
%A Lieberman, Michael A. 
%T RF Discharge Impedance Measurements and Comparison to a Discharge Model
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/34
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/1998.html
%F Sato:M92/34