S.F-H. Lee

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/69

1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-69.pdf

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BibTeX citation:

@techreport{Lee:M92/69,
    Author= {Lee, S.F-H.},
    Title= {A Three-Dimensional Physically-Based Model for LPCVD},
    Year= {1992},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2078.html},
    Number= {UCB/ERL M92/69},
}

EndNote citation:

%0 Report
%A Lee, S.F-H. 
%T A Three-Dimensional Physically-Based Model for LPCVD
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/69
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2078.html
%F Lee:M92/69