A Three-Dimensional Physically-Based Model for LPCVD

S.F-H. Lee

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/69
May 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-69.pdf

BibTeX citation:

@techreport{Lee:M92/69,
    Author = {Lee, S.F-H.},
    Title = {A Three-Dimensional Physically-Based Model for LPCVD},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2078.html},
    Number = {UCB/ERL M92/69}
}

EndNote citation:

%0 Report
%A Lee, S.F-H.
%T A Three-Dimensional Physically-Based Model for LPCVD
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/69
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2078.html
%F Lee:M92/69