S. Leang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/70

1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-70.pdf

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BibTeX citation:

@techreport{Leang:M92/70,
    Author= {Leang, S.},
    Title= {Supervisory Control System for a Photo- lithographic Workcell},
    Year= {1992},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2079.html},
    Number= {UCB/ERL M92/70},
}

EndNote citation:

%0 Report
%A Leang, S. 
%T Supervisory Control System for a Photo- lithographic Workcell
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/70
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2079.html
%F Leang:M92/70