Plasma and Gas Phase Kinetics of High Density SF_6 Discharges

C. Lee, D.W. Hess and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/95
September 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-95.pdf

BibTeX citation:

@techreport{Lee:M92/95,
    Author = {Lee, C. and Hess, D.W. and Lieberman, Michael A.},
    Title = {Plasma and Gas Phase Kinetics of High Density SF_6 Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2153.html},
    Number = {UCB/ERL M92/95}
}

EndNote citation:

%0 Report
%A Lee, C.
%A Hess, D.W.
%A Lieberman, Michael A.
%T Plasma and Gas Phase Kinetics of High Density SF_6 Discharges
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/95
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2153.html
%F Lee:M92/95