Plasma and Gas Phase Kinetics of High Density SF_6 Discharges

C. Lee and D.W. Hess and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/95

1992

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/Archive/ERL-92-95.pdf

BibTeX citation:

@techreport{Lee:M92/95,
    Author= {Lee, C. and Hess, D.W. and Lieberman, Michael A.},
    Title= {Plasma and Gas Phase Kinetics of High Density SF_6 Discharges},
    Year= {1992},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2153.html},
    Number= {UCB/ERL M92/95},
}

EndNote citation:

%0 Report
%A Lee, C. 
%A Hess, D.W. 
%A Lieberman, Michael A. 
%T Plasma and Gas Phase Kinetics of High Density SF_6 Discharges
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/95
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2153.html
%F Lee:M92/95