Analytic Model of the Ion Angular Distribution in a Collisional Sheath

V. Vahedi and R.A. Stewart and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/114

1992

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/Archive/ERL-92-114.pdf

BibTeX citation:

@techreport{Vahedi:M92/114,
    Author= {Vahedi, V. and Stewart, R.A. and Lieberman, Michael A.},
    Title= {Analytic Model of the Ion Angular Distribution in a Collisional Sheath},
    Year= {1992},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2187.html},
    Number= {UCB/ERL M92/114},
}

EndNote citation:

%0 Report
%A Vahedi, V. 
%A Stewart, R.A. 
%A Lieberman, Michael A. 
%T Analytic Model of the Ion Angular Distribution in a Collisional Sheath
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/114
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2187.html
%F Vahedi:M92/114