D.M. Newmark
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/132
December 1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-132.pdf
BibTeX citation:
@techreport{Newmark:M92/132, Author = {Newmark, D.M.}, Title = {Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering}, Institution = {EECS Department, University of California, Berkeley}, Year = {1992}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html}, Number = {UCB/ERL M92/132} }
EndNote citation:
%0 Report %A Newmark, D.M. %T Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/132 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html %F Newmark:M92/132