Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering
D.M. Newmark
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M92/132
1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-132.pdf
BibTeX citation:
@techreport{Newmark:M92/132,
Author= {Newmark, D.M.},
Title= {Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering},
Year= {1992},
Month= {Dec},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html},
Number= {UCB/ERL M92/132},
}
EndNote citation:
%0 Report %A Newmark, D.M. %T Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/132 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html %F Newmark:M92/132