MTCAD: An Integrated Framework of Manufacturing Equipment Models and TCAD

M. Hosseini

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/136
November 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-136.pdf

BibTeX citation:

@techreport{Hosseini:M92/136,
    Author = {Hosseini, M.},
    Title = {MTCAD: An Integrated Framework of Manufacturing Equipment Models and TCAD},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {Nov},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2236.html},
    Number = {UCB/ERL M92/136}
}

EndNote citation:

%0 Report
%A Hosseini, M.
%T MTCAD: An Integrated Framework of Manufacturing Equipment Models and TCAD
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/136
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2236.html
%F Hosseini:M92/136