Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography

L. Leinbaugh

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/144
December 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-144.pdf

BibTeX citation:

@techreport{Leinbaugh:M92/144,
    Author = {Leinbaugh, L.},
    Title = {Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2246.html},
    Number = {UCB/ERL M92/144}
}

EndNote citation:

%0 Report
%A Leinbaugh, L.
%T Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/144
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2246.html
%F Leinbaugh:M92/144