V. Vahedi and Charles K. (Ned) Birdsall and Michael A. Lieberman and G. DiPeso and T.D. Rognlien

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/146

, 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-146.pdf

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BibTeX citation:

@techreport{Vahedi:M92/146,
    Author= {Vahedi, V. and Birdsall, Charles K. (Ned) and Lieberman, Michael A. and DiPeso, G. and Rognlien, T.D.},
    Title= {Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations},
    Year= {1992},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2248.html},
    Number= {UCB/ERL M92/146},
}

EndNote citation:

%0 Report
%A Vahedi, V. 
%A Birdsall, Charles K. (Ned) 
%A Lieberman, Michael A. 
%A DiPeso, G. 
%A Rognlien, T.D. 
%T Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/146
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2248.html
%F Vahedi:M92/146