A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry
Weijie Yun
EECS Department, University of California, Berkeley
1992
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Yun:7824, Author= {Yun, Weijie}, Title= {A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry}, School= {EECS Department, University of California, Berkeley}, Year= {1992}, }
EndNote citation:
%0 Thesis %A Yun, Weijie %T A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry %I EECS Department, University of California, Berkeley %D 1992 %F Yun:7824