A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry
Weijie Yun
EECS Department, University of California, Berkeley
1992
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Yun:7824,
Author= {Yun, Weijie},
Title= {A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry},
School= {EECS Department, University of California, Berkeley},
Year= {1992},
}
EndNote citation:
%0 Thesis %A Yun, Weijie %T A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry %I EECS Department, University of California, Berkeley %D 1992 %F Yun:7824