Image Synthesis: Binary and Phase Shift Mask Design for Optical Lithography
Yong Liu
EECS Department, University of California, Berkeley
1992
Advisors: Avideh Zakhor
BibTeX citation:
@phdthesis{Liu:7834, Author= {Liu, Yong}, Title= {Image Synthesis: Binary and Phase Shift Mask Design for Optical Lithography}, School= {EECS Department, University of California, Berkeley}, Year= {1992}, }
EndNote citation:
%0 Thesis %A Liu, Yong %T Image Synthesis: Binary and Phase Shift Mask Design for Optical Lithography %I EECS Department, University of California, Berkeley %D 1992 %F Liu:7834