Hyungcheol Shin

EECS Department, University of California, Berkeley

1993

Advisors: Chenming Hu

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BibTeX citation:

@phdthesis{Shin:7862,
    Author= {Shin, Hyungcheol},
    Title= {Thin Oxide Damage by Plasma Processing},
    School= {EECS Department, University of California, Berkeley},
    Year= {1993},
}

EndNote citation:

%0 Thesis
%A Shin, Hyungcheol 
%T Thin Oxide Damage by Plasma Processing
%I EECS Department, University of California, Berkeley
%D 1993
%F Shin:7862