Vahid Vahedi

EECS Department, University of California, Berkeley

1993

Advisors: Charles K. Birdsall

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BibTeX citation:

@phdthesis{Vahedi:7866,
    Author= {Vahedi, Vahid},
    Title= {Modeling and Simulation of RF Discharges Used for Plasma Processing},
    School= {EECS Department, University of California, Berkeley},
    Year= {1993},
}

EndNote citation:

%0 Thesis
%A Vahedi, Vahid 
%T Modeling and Simulation of RF Discharges Used for Plasma Processing
%I EECS Department, University of California, Berkeley
%D 1993
%F Vahedi:7866