C. Lee and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/49
June 1994
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-49.pdf
BibTeX citation:
@techreport{Lee:M94/49, Author = {Lee, C. and Lieberman, Michael A.}, Title = {Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges}, Institution = {EECS Department, University of California, Berkeley}, Year = {1994}, Month = {Jun}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2582.html}, Number = {UCB/ERL M94/49} }
EndNote citation:
%0 Report %A Lee, C. %A Lieberman, Michael A. %T Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/49 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2582.html %F Lee:M94/49