Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas
S. Ashida and Michael A. Lieberman and C. Lee
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M94/50
, 1994
BibTeX citation:
@techreport{Ashida:M94/50, Author= {Ashida, S. and Lieberman, Michael A. and Lee, C.}, Title= {Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas}, Year= {1994}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html}, Number= {UCB/ERL M94/50}, }
EndNote citation:
%0 Report %A Ashida, S. %A Lieberman, Michael A. %A Lee, C. %T Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/50 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html %F Ashida:M94/50