Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas

S. Ashida, Michael A. Lieberman and C. Lee

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/50
1994


BibTeX citation:

@techreport{Ashida:M94/50,
    Author = {Ashida, S. and Lieberman, Michael A. and Lee, C.},
    Title = {Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html},
    Number = {UCB/ERL M94/50}
}

EndNote citation:

%0 Report
%A Ashida, S.
%A Lieberman, Michael A.
%A Lee, C.
%T Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/50
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2584.html
%F Ashida:M94/50