Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source

P.N. Wainman and Michael A. Lieberman and Allan J. Lichtenberg and R.A. Stewart and C. Lee

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M94/56

1994

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/Archive/ERL-94-56.pdf

BibTeX citation:

@techreport{Wainman:M94/56,
    Author= {Wainman, P.N. and Lieberman, Michael A. and Lichtenberg, Allan J. and Stewart, R.A. and Lee, C.},
    Title= {Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source},
    Year= {1994},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html},
    Number= {UCB/ERL M94/56},
}

EndNote citation:

%0 Report
%A Wainman, P.N. 
%A Lieberman, Michael A. 
%A Lichtenberg, Allan J. 
%A Stewart, R.A. 
%A Lee, C. 
%T Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/56
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html
%F Wainman:M94/56