P.N. Wainman and Michael A. Lieberman and Allan J. Lichtenberg and R.A. Stewart and C. Lee

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M94/56

, 1994

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-56.pdf

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BibTeX citation:

@techreport{Wainman:M94/56,
    Author= {Wainman, P.N. and Lieberman, Michael A. and Lichtenberg, Allan J. and Stewart, R.A. and Lee, C.},
    Title= {Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source},
    Year= {1994},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html},
    Number= {UCB/ERL M94/56},
}

EndNote citation:

%0 Report
%A Wainman, P.N. 
%A Lieberman, Michael A. 
%A Lichtenberg, Allan J. 
%A Stewart, R.A. 
%A Lee, C. 
%T Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/56
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2594.html
%F Wainman:M94/56