Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges

D.L. Flamm

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M94/58

1994

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BibTeX citation:

@techreport{Flamm:M94/58,
    Author= {Flamm, D.L.},
    Title= {Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges},
    Year= {1994},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2600.html},
    Number= {UCB/ERL M94/58},
}

EndNote citation:

%0 Report
%A Flamm, D.L. 
%T Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/58
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2600.html
%F Flamm:M94/58