D.L. Flamm
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/58
1994
BibTeX citation:
@techreport{Flamm:M94/58, Author = {Flamm, D.L.}, Title = {Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges}, Institution = {EECS Department, University of California, Berkeley}, Year = {1994}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2600.html}, Number = {UCB/ERL M94/58} }
EndNote citation:
%0 Report %A Flamm, D.L. %T Sidewall Protection Mechanisms in Halocarbon and Halogen Discharges %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/58 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2600.html %F Flamm:M94/58