A. Wong

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M94/64

, 1994

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-64.pdf

The acronym TEMPEST stands for "Time-domain Electromagnetic Massively Parallel Evaluation of Scattering from Topography." The computer program solves Maxwell's equations using a time-domain finite-difference algorithm, where the electric and magnetic field nodes are spatially and temporally staggered over a three-dimensional topography of interest. It takes advantage of the inherent parallel nature of electromagnetic wave propagation and is implemented on the computer architecture connection machine 5 (CM-5). The simulation domain may represent periodic, isolated, or symmetric topography. The algorithm is capable of simulating problems such as scattering from asymmetrical alignment marks, transmission through phase-shifting masks, effects of line-edge profiles in metrology as well as dynamic bleaching of photoresist over arbitrary non-planar, inhomogeneous wafer topographies.

Illumination is assumed to be monochromatic, with the electric field linearly polarized in any user-specified direction. The incident angle can take on discrete values depending on the illumination wavelength and the dimension of the simulation domain. Illumination is assumed to be coherent and can consist of any intensity profile such as that calculated from SPLAT. The steady-state electric fields as well as the magnitudes and phases of diffraction harmonics are found. The photosensitizer concentration is calculated if a layer of photoresist is present. The matrix containing this concentration information can be used in other simulation programs such as SAMPLE for simulation of resist development. Information on the diffraction harmonics is used to form optical image profiles in SPLAT. Imaging can be done on the scattered fields (for example, reflected light from alignment marks) or the transmitted fields (for example, light passing through a phase-shift mask).

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BibTeX citation:

@techreport{Wong:M94/64,
    Author= {Wong, A.},
    Title= {TEMPEST User's Guide},
    Year= {1994},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2609.html},
    Number= {UCB/ERL M94/64},
    Abstract= {The acronym TEMPEST stands for "Time-domain Electromagnetic 
Massively Parallel Evaluation of Scattering from Topography." The
computer program solves Maxwell's equations using a time-domain
finite-difference algorithm, where the electric and magnetic
field nodes are spatially and temporally staggered over a
three-dimensional topography of interest. It takes advantage of the
inherent parallel nature of electromagnetic wave propagation and
is implemented on the computer architecture connection machine 5
(CM-5).  The simulation domain may represent periodic, isolated,
or symmetric topography.  The algorithm is capable of simulating
problems such as scattering from asymmetrical alignment marks,
transmission through phase-shifting masks, effects of line-edge
profiles in metrology as well as dynamic bleaching of photoresist 
over arbitrary non-planar, inhomogeneous wafer topographies.

Illumination is assumed to be monochromatic, with the electric field
linearly polarized in any user-specified direction. The incident
angle can take on discrete values depending on the illumination
wavelength and the dimension of the simulation domain. Illumination
is assumed to be coherent and can consist of any intensity profile
such as that calculated from SPLAT. The steady-state electric fields
as well as the magnitudes and phases of diffraction harmonics are
found. The photosensitizer concentration is calculated if a layer of
photoresist is present. The matrix containing this concentration
information can be used in other simulation programs such as
SAMPLE for simulation of resist development. Information on the
diffraction harmonics is used to form optical image profiles in 
SPLAT. Imaging can be done on the scattered fields (for example,
reflected light from alignment marks) or the transmitted fields
(for example, light passing through a phase-shift mask).},
}

EndNote citation:

%0 Report
%A Wong, A. 
%T TEMPEST User's Guide
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/64
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2609.html
%F Wong:M94/64