S-Y. Ma

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M94/84

1994

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-84.pdf

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BibTeX citation:

@techreport{Ma:M94/84,
    Author= {Ma, S-Y.},
    Title= {The Application of Dynamic Specifications in a Multistep Lithographic Sequence},
    Year= {1994},
    Month= {Oct},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2647.html},
    Number= {UCB/ERL M94/84},
}

EndNote citation:

%0 Report
%A Ma, S-Y. 
%T The Application of Dynamic Specifications in a Multistep Lithographic Sequence
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/84
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2647.html
%F Ma:M94/84