S-Y. Ma
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/84
October 1994
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-84.pdf
BibTeX citation:
@techreport{Ma:M94/84, Author = {Ma, S-Y.}, Title = {The Application of Dynamic Specifications in a Multistep Lithographic Sequence}, Institution = {EECS Department, University of California, Berkeley}, Year = {1994}, Month = {Oct}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2647.html}, Number = {UCB/ERL M94/84} }
EndNote citation:
%0 Report %A Ma, S-Y. %T The Application of Dynamic Specifications in a Multistep Lithographic Sequence %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/84 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2647.html %F Ma:M94/84