Sherry F. Lee

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M94/104

, 1994

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-104.pdf

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{Lee:M94/104,
    Author= {Lee, Sherry F.},
    Title= {Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals},
    School= {EECS Department, University of California, Berkeley},
    Year= {1994},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html},
    Number= {UCB/ERL M94/104},
}

EndNote citation:

%0 Thesis
%A Lee, Sherry F. 
%T Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/104
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html
%F Lee:M94/104