Simulation of Microelectromechanical Systems
Gary K. Fedder
EECS Department, University of California, Berkeley
1994
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Fedder:7908, Author= {Fedder, Gary K.}, Title= {Simulation of Microelectromechanical Systems}, School= {EECS Department, University of California, Berkeley}, Year= {1994}, }
EndNote citation:
%0 Thesis %A Fedder, Gary K. %T Simulation of Microelectromechanical Systems %I EECS Department, University of California, Berkeley %D 1994 %F Fedder:7908