John M. Hutchinson

EECS Department, University of California, Berkeley

1994

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Hutchinson:7914,
    Author= {Hutchinson, John M.},
    Title= {Issues in Deep-UV Photoresist Technology: Characterization and Modeling of Bulk and Surface Imaged Resists for 248 and 213 nm Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {1994},
}

EndNote citation:

%0 Thesis
%A Hutchinson, John M. 
%T Issues in Deep-UV Photoresist Technology: Characterization and Modeling of Bulk and Surface Imaged Resists for 248 and 213 nm Lithography
%I EECS Department, University of California, Berkeley
%D 1994
%F Hutchinson:7914