Micromechanisms Using Sidewall Beams
Michael W. Judy
EECS Department, University of California, Berkeley
1994
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Judy:7915, Author= {Judy, Michael W.}, Title= {Micromechanisms Using Sidewall Beams}, School= {EECS Department, University of California, Berkeley}, Year= {1994}, }
EndNote citation:
%0 Thesis %A Judy, Michael W. %T Micromechanisms Using Sidewall Beams %I EECS Department, University of California, Berkeley %D 1994 %F Judy:7915