Khanh B. Nguyen

EECS Department, University of California, Berkeley

1994

Advisors: David T. Attwood

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BibTeX citation:

@phdthesis{Nguyen:7922,
    Author= {Nguyen, Khanh B.},
    Title= {Reflective Masks for Extreme Ultraviolet Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {1994},
}

EndNote citation:

%0 Thesis
%A Nguyen, Khanh B. 
%T Reflective Masks for Extreme Ultraviolet Lithography
%I EECS Department, University of California, Berkeley
%D 1994
%F Nguyen:7922