A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data

Raymond L. Chen

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/6

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-6.pdf

Advisors: Costas J. Spanos

BibTeX citation:

@phdthesis{Chen:M95/6,
    Author= {Chen, Raymond L.},
    Title= {A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data},
    School= {EECS Department, University of California, Berkeley},
    Year= {1995},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html},
    Number= {UCB/ERL M95/6},
}

EndNote citation:

%0 Thesis
%A Chen, Raymond L. 
%T A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/6
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html
%F Chen:M95/6