A Comparison of Three Dimensional Photolithography Simulators

John J. Helmsen

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/25

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-25.pdf

Advisors: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Helmsen:M95/25,
    Author= {Helmsen, John J.},
    Title= {A Comparison of Three Dimensional Photolithography Simulators},
    School= {EECS Department, University of California, Berkeley},
    Year= {1995},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2751.html},
    Number= {UCB/ERL M95/25},
}

EndNote citation:

%0 Thesis
%A Helmsen, John J. 
%T A Comparison of Three Dimensional Photolithography Simulators
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/25
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2751.html
%F Helmsen:M95/25