Impedance Modeling of Cl_2/He Plasma Discharges
A.J. Miranda
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M95/31
1995
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-31.pdf
BibTeX citation:
@techreport{Miranda:M95/31,
Author= {Miranda, A.J.},
Title= {Impedance Modeling of Cl_2/He Plasma Discharges},
Year= {1995},
Month= {Apr},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html},
Number= {UCB/ERL M95/31},
}
EndNote citation:
%0 Report %A Miranda, A.J. %T Impedance Modeling of Cl_2/He Plasma Discharges %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/31 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html %F Miranda:M95/31