Impedance Modeling of Cl_2/He Plasma Discharges

A.J. Miranda

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/31

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-31.pdf

BibTeX citation:

@techreport{Miranda:M95/31,
    Author= {Miranda, A.J.},
    Title= {Impedance Modeling of Cl_2/He Plasma Discharges},
    Year= {1995},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html},
    Number= {UCB/ERL M95/31},
}

EndNote citation:

%0 Report
%A Miranda, A.J. 
%T Impedance Modeling of Cl_2/He Plasma Discharges
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/31
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2764.html
%F Miranda:M95/31