Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors

E. Kawamura and V. Vahedi and Michael A. Lieberman and Charles K. (Ned) Birdsall

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/49

1995

This publication is archived. It is kept only for reference purposes, so it is no longer being updated and may not meet accessibility standards. If you need this content in a different format, please email webteam@eecs.berkeley.edu.

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-49.pdf

BibTeX citation:

@techreport{Kawamura:M95/49,
    Author= {Kawamura, E. and Vahedi, V. and Lieberman, Michael A. and Birdsall, Charles K. (Ned)},
    Title= {Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors},
    Year= {1995},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2791.html},
    Number= {UCB/ERL M95/49},
}

EndNote citation:

%0 Report
%A Kawamura, E. 
%A Vahedi, V. 
%A Lieberman, Michael A. 
%A Birdsall, Charles K. (Ned) 
%T Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2791.html
%F Kawamura:M95/49