E. Kawamura and V. Vahedi and Michael A. Lieberman and Charles K. (Ned) Birdsall

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/49

, 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-49.pdf

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BibTeX citation:

@techreport{Kawamura:M95/49,
    Author= {Kawamura, E. and Vahedi, V. and Lieberman, Michael A. and Birdsall, Charles K. (Ned)},
    Title= {Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors},
    Year= {1995},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2791.html},
    Number= {UCB/ERL M95/49},
}

EndNote citation:

%0 Report
%A Kawamura, E. 
%A Vahedi, V. 
%A Lieberman, Michael A. 
%A Birdsall, Charles K. (Ned) 
%T Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2791.html
%F Kawamura:M95/49