Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing

Y. Wu and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/60

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-60.pdf

BibTeX citation:

@techreport{Wu:M95/60,
    Author= {Wu, Y. and Lieberman, Michael A.},
    Title= {Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing},
    Year= {1995},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2823.html},
    Number= {UCB/ERL M95/60},
}

EndNote citation:

%0 Report
%A Wu, Y. 
%A Lieberman, Michael A. 
%T Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/60
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2823.html
%F Wu:M95/60