An RF Voltage Divider for an Inductively Powered Plasma Source
D. Whiteson
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M95/61
, 1995
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-61.pdf
BibTeX citation:
@techreport{Whiteson:M95/61, Author= {Whiteson, D.}, Title= {An RF Voltage Divider for an Inductively Powered Plasma Source}, Year= {1995}, Month= {Aug}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2825.html}, Number= {UCB/ERL M95/61}, }
EndNote citation:
%0 Report %A Whiteson, D. %T An RF Voltage Divider for an Inductively Powered Plasma Source %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/61 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2825.html %F Whiteson:M95/61