An RF Voltage Divider for an Inductively Powered Plasma Source

D. Whiteson

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/61

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-61.pdf

BibTeX citation:

@techreport{Whiteson:M95/61,
    Author= {Whiteson, D.},
    Title= {An RF Voltage Divider for an Inductively Powered Plasma Source},
    Year= {1995},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2825.html},
    Number= {UCB/ERL M95/61},
}

EndNote citation:

%0 Report
%A Whiteson, D. 
%T An RF Voltage Divider for an Inductively Powered Plasma Source
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/61
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2825.html
%F Whiteson:M95/61