An RF Voltage Divider for an Inductively Powered Plasma Source

D. Whiteson

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/61
August 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-61.pdf

BibTeX citation:

@techreport{Whiteson:M95/61,
    Author = {Whiteson, D.},
    Title = {An RF Voltage Divider for an Inductively Powered Plasma Source},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2825.html},
    Number = {UCB/ERL M95/61}
}

EndNote citation:

%0 Report
%A Whiteson, D.
%T An RF Voltage Divider for an Inductively Powered Plasma Source
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/61
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2825.html
%F Whiteson:M95/61