Simulation and Analysis of a Large Area Plasma Source

V.P. Gopinath and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/65

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-65.pdf

BibTeX citation:

@techreport{Gopinath:M95/65,
    Author= {Gopinath, V.P. and Lieberman, Michael A.},
    Title= {Simulation and Analysis of a Large Area Plasma Source},
    Year= {1995},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2845.html},
    Number= {UCB/ERL M95/65},
}

EndNote citation:

%0 Report
%A Gopinath, V.P. 
%A Lieberman, Michael A. 
%T Simulation and Analysis of a Large Area Plasma Source
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/65
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2845.html
%F Gopinath:M95/65