Simulation and Analysis of a Large Area Plasma Source

V.P. Gopinath and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/65
June 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-65.pdf

BibTeX citation:

@techreport{Gopinath:M95/65,
    Author = {Gopinath, V.P. and Lieberman, Michael A.},
    Title = {Simulation and Analysis of a Large Area Plasma Source},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2845.html},
    Number = {UCB/ERL M95/65}
}

EndNote citation:

%0 Report
%A Gopinath, V.P.
%A Lieberman, Michael A.
%T Simulation and Analysis of a Large Area Plasma Source
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/65
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2845.html
%F Gopinath:M95/65