A Control and Diagnostic System for the Photolithography Process Sequence

Sovarong Leang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/69

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-69.pdf

Advisors: Costas J. Spanos

BibTeX citation:

@phdthesis{Leang:M95/69,
    Author= {Leang, Sovarong},
    Title= {A Control and Diagnostic System for the Photolithography Process Sequence},
    School= {EECS Department, University of California, Berkeley},
    Year= {1995},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2853.html},
    Number= {UCB/ERL M95/69},
}

EndNote citation:

%0 Thesis
%A Leang, Sovarong 
%T A Control and Diagnostic System for the Photolithography Process Sequence
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/69
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2853.html
%F Leang:M95/69