Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding

P.I. Hagouel

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/72

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-72.pdf

BibTeX citation:

@techreport{Hagouel:M95/72,
    Author= {Hagouel, P.I.},
    Title= {Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding},
    Year= {1995},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html},
    Number= {UCB/ERL M95/72},
}

EndNote citation:

%0 Report
%A Hagouel, P.I. 
%T Resist Studies for TCAD Modeling 1. Negative Resist Corner Rounding
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/72
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2858.html
%F Hagouel:M95/72