Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges
Michael A. Lieberman and S. Ashida
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M95/83
1995
This publication is archived. It is kept only for reference purposes, so it is no longer being updated and may not meet accessibility standards. If you need this content in a different format, please email webteam@eecs.berkeley.edu.
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-83.pdf
BibTeX citation:
@techreport{Lieberman:M95/83,
Author= {Lieberman, Michael A. and Ashida, S.},
Title= {Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges},
Year= {1995},
Month= {Oct},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2884.html},
Number= {UCB/ERL M95/83},
}
EndNote citation:
%0 Report %A Lieberman, Michael A. %A Ashida, S. %T Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/83 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2884.html %F Lieberman:M95/83