Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges

Michael A. Lieberman and S. Ashida

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/83
October 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-83.pdf

BibTeX citation:

@techreport{Lieberman:M95/83,
    Author = {Lieberman, Michael A. and Ashida, S.},
    Title = {Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Oct},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2884.html},
    Number = {UCB/ERL M95/83}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%A Ashida, S.
%T Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/83
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2884.html
%F Lieberman:M95/83