Modeling Electronegative Discharges at Low Pressure

I. Kouznetsov, Allan J. Lichtenberg and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/97
November 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-97.pdf


BibTeX citation:

@techreport{Kouznetsov:M95/97,
    Author = {Kouznetsov, I. and Lichtenberg, Allan J. and Lieberman, Michael A.},
    Title = {Modeling Electronegative Discharges at Low Pressure},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Nov},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html},
    Number = {UCB/ERL M95/97}
}

EndNote citation:

%0 Report
%A Kouznetsov, I.
%A Lichtenberg, Allan J.
%A Lieberman, Michael A.
%T Modeling Electronegative Discharges at Low Pressure
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/97
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html
%F Kouznetsov:M95/97