Modeling Electronegative Discharges at Low Pressure

I. Kouznetsov and Allan J. Lichtenberg and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/97

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-97.pdf

BibTeX citation:

@techreport{Kouznetsov:M95/97,
    Author= {Kouznetsov, I. and Lichtenberg, Allan J. and Lieberman, Michael A.},
    Title= {Modeling Electronegative Discharges at Low Pressure},
    Year= {1995},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html},
    Number= {UCB/ERL M95/97},
}

EndNote citation:

%0 Report
%A Kouznetsov, I. 
%A Lichtenberg, Allan J. 
%A Lieberman, Michael A. 
%T Modeling Electronegative Discharges at Low Pressure
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/97
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html
%F Kouznetsov:M95/97