Modeling Electronegative Discharges at Low Pressure
I. Kouznetsov and Allan J. Lichtenberg and Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M95/97
, 1995
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-97.pdf
BibTeX citation:
@techreport{Kouznetsov:M95/97, Author= {Kouznetsov, I. and Lichtenberg, Allan J. and Lieberman, Michael A.}, Title= {Modeling Electronegative Discharges at Low Pressure}, Year= {1995}, Month= {Nov}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html}, Number= {UCB/ERL M95/97}, }
EndNote citation:
%0 Report %A Kouznetsov, I. %A Lichtenberg, Allan J. %A Lieberman, Michael A. %T Modeling Electronegative Discharges at Low Pressure %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/97 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2912.html %F Kouznetsov:M95/97