CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory
S. Fang
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M95/98
, 1995
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-98.pdf
BibTeX citation:
@techreport{Fang:M95/98, Author= {Fang, S.}, Title= {CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory}, Year= {1995}, Month= {Dec}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html}, Number= {UCB/ERL M95/98}, }
EndNote citation:
%0 Report %A Fang, S. %T CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/98 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html %F Fang:M95/98