CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory

S. Fang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/98
December 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-98.pdf

BibTeX citation:

@techreport{Fang:M95/98,
    Author = {Fang, S.},
    Title = {CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html},
    Number = {UCB/ERL M95/98}
}

EndNote citation:

%0 Report
%A Fang, S.
%T CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/98
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html
%F Fang:M95/98