CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory

S. Fang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M95/98

1995

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/Archive/ERL-95-98.pdf

BibTeX citation:

@techreport{Fang:M95/98,
    Author= {Fang, S.},
    Title= {CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory},
    Year= {1995},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html},
    Number= {UCB/ERL M95/98},
}

EndNote citation:

%0 Report
%A Fang, S. 
%T CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/98
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2915.html
%F Fang:M95/98